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3.2 Chemical composition over 0.95 for the sample S-12AOw. The differences appear in spatial dependence of film thickness - there is a gradient of film thickness, and the absolute thickness ranges from about 100 to 130 nanometers. The thickness evaluation was done us- ing XRF Fundamental Parameters method and the resulting data was processed using Origin software. The raw data measured with 250 μm resolution, however, it was smoothed and reconstructed for clarity (the resolution was artificially in- creased and the data was averaged over the nearest neighbour points). Figure 3.5: Macroscopic elemental distribution and thickness of S- 12AOw thin film - Calculated from XRF and visualized by estimation and ap- proximation by nearest neighbours. Distribution of nickel, samarium and chromium element is shown. Additionally Ni:Sm atomic ratio and sample thickness distribu- tion as well. The sample as seen on XRF camera and analysis area defined in red rectangle in the first image. Sample S-24AOw exhibits a gradient in chemical composition as well as in thickness (figure 3.6). The differences, however, are relatively small. The biggest variation of the thickness can be found on the edge of the sample, while in the centre of the sample, there is very little variation. It should be noted that there was only a part of the sputtered S-30AOn film that was cut away in order to investigate the material before high temperature and pressure annealing. Therefore what is presented is an unannealed part of S- 30AOn sample. The distribution of elemental concentration is quite homogeneous, 67PDF Image | Investigation of metal-insulator transition in magnetron sputtered samarium nickelate thin films
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