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Figure 6.2: Normalized Ar/CO2 emission spectra at 1 kw. Ar flow rate is 8 slm and CO2 flow rate is 1 slm. the addition of CO2. The strong change in color demonstrates that Ar is no longer the primary excited species in the plasma, with the C2 system having strong emission in the green visible spectrum. 6.1.2 Mass Spectrometry of the CO2/Ar Plasma Variations in the CO2:Ar flow rate ratio were investigated to determine an optimal operating condition for efficient CO2 dissociation. The flow rate ratio remained constant while microwave input power was varied from 1-2 kW. As CO2 flow rate increased past 4 slm, the microwave forward power required to maintain a stable discharge was at least 1.5 kW. The three stub tuner waveguide used to match the plasma impedance to the magnetron kept reflected power below 10 W for all operating conditions. As with the experimental MS results described in Chapter IV, care must be taken with data analysis to ensure the values reported at 28 amu/qe represent singly ionized 110PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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