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Figure 6.14: Plasma temperature results from SPECAIR simulations. Results pre- sented for CO2 flow rates 1-8 slm, Ar flow rate 10 slm, and power from 1-2 kW. nitrogen discharges [63]. Other radiative excited species like C2, OH, or CN can cause a tendency to overestimate the temperature because these species result from chemical reactions, and thus the residual chemical energy can increase the measured temperature [63,111]. Also, given that the molar fraction of C2 is less than 1% in the experimental discharge presented here, the rotational temperature may not accurately describe the entire bulk gas temperature. However, others have tested how well the C2 gas temperature matches the tempera- ture obtained using the N2 2nd positive system. These experiments were performed in a moderate pressure (0.5-10 torr) inductively coupled plasma source with a background gas mixture of C2F6, O2, N2, and Ar [3]. Rotational temperature measurements ob- tained from N2 and C2 emission in the same plasma were found to agree reasonably well, 5270 K and 5500 K respectively [3]. The vibrational temperature determined from theC2 ∆v=0bandwas8700K,whichisclosetotheTv =8000Kreportedinthis work. Thus in some discharge systems, C2 emission may be an accurate thermometer for gas temperature. An estimate of the gas temperature can be calculated using thermodynamic 122PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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