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Figure 6. Design, operating principle, and performance of a TENG in the metal-to-dielectric in contact-separation mode. (a) Schematic diagram and digital photography of an arch-structured flexible triboelectric nanogenerator. Equivalent circuit of the TENG with an external load of R when the device is at (b) origin, (c) pressing, and (d) releasing states and (e) corresponding currenttime curve, respectively. (f) Linear superposition tests of two TENGs (G1 and G2) connected in parallel with the same polarity (G1 þ G2) and opposite polarity (G1 G2). Reproduced with permission from ref 21. Copyright 2013 Elsevier. PTFE surface, σ1 is the charge density of the Cu surface that is contacted with PTFE, and σ2 is charge density of the Ag upper surface (Figure 6b), we have21 electrification between patterned PDMS as the top plate and patterned Al foil as the bottom plate (Figure 7a).18 According to the triboelectric series, the purposely chosen PDMS and Al are almost at the two ends with very large differences in the ability to attract and retain electrons. The unique arch-shaped structure of the TENG from the naturally bent top plate, which helps to carry out the action of effective charge separa- tion and contact using the elasticity of the film, is achieved by the following innovative fabrication pro- cess (Figure 7b,c): The top part starts from a piece of flat Kapton film (Figure 7b,i). A layer of 500 nm SiO2 film is deposited using plasma-enhanced chemical vapor deposition (PECVD) at 250 C (Figure 7b,ii). Upon cool- ing to room temperature, the Kapton will shrink to a much larger extent than the SiO2 film because of the large difference in thermal expansion coefficients, so that thermal stress across the interface will make the plate bent naturally toward the SiO2 side. Then, the prefabricated PDMS film with pyramid patterns is glued to the inner surface through a thin PDMS bonding layer (Figure 7b,iii). Finally, the electrode is deposited on top (Figure 7b,iv). As for the bottom plate, an aluminum foil (Figure 7c,i) is patterned with a typical photolithography process: defining the photo- resist to the array of square windows (Figure 7c,ii), depo- siting a layer of aluminum on top (Figure 7c,iii), and finally lift-off, leaving the patterned Al cubes on the foil (Figure 7c,iv). At last, the two as-fabricated plates of the same size are attached face-to-face and sealed at the two ends. The soft Al plate will be forced to bend outward under the contraction from the other plate, so that a gap will form naturally between. The patterned surfaces of PDMS film (Figure 7d) and Al foil σ σ11⁄4 d 1þ1 d2 εrp (3) σ2 1⁄4σσ1 (4) where d1 and εrp are the thickness and permittivity of PTFE, respectively, and charge Q is stable for a relatively long time on the PTFE surface; thus σ1 is dictated by the gap distance d2. The variation of d2 will result in the redistribution of the charges between Cu and Ag electrodes through the load R that generates a current through the load, so that mechanical energy is con- verted into electricity. The working mechanism of the TENG is similar to a variable-capacitance generator22 except that the charges are self-generated triboelectric charges rather than an external power source. Once the TENG was pressed (Figure 6c), a reduction of the interlayer distance of d2 would decrease σ1 according to eq 3, which results in an instantaneous positive current (Figure 6e). Upon the TENG being released (Figure 6d), the device would revert back to its original arch shape due to resilience, the interlayer distance d2 would increase, and the surface charge σ1 increased as well, resulting in an instantaneous negative current (Figure 6e). Although the mechanism illustrated in Figure 6 is for a flat surface, micro- or nanopatterns can be gen- erated on surfaces to enhance the contact area and the effectiveness of the triboelectrification. The TENG shown in Figure 7 is based on the contact WANG VOL. XXX ’ NO. XX ’ 000–000 ’ XXXX H www.acsnano.org REVIEWPDF Image | Triboelectric Nanogenerators as New Energy Technology
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