Understanding CO2 containing non-equilibrium plasmas

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Understanding CO2 containing non-equilibrium plasmas ( understanding-co2-containing-non-equilibrium-plasmas )

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Figure 5.11: Rate coefficients of electron impact excitation and de-excitation of CO2(v31) as function of mean electron energy the electrons or producing them at lower ionization costs. Ionization cost can be reduced by using chemical species possessing lower ionization potentials [246]; electrons can also be produced at low energy cost by using materials with higher secondary electron emission coefficients such as MgO [247, 248]; or using materials with negative electron affinity. However, one of the easiest approaches is to operate the plasma at higher fre- quencies such that the electrons produced are not lost by recombination, thus gaining in ionization cost. But the frequencies should not be so extremely high that the electrons see only an average electric field such as in microwave plasmas [228]. A similar strategy to increase electron densities has been used in RF plasmas, by increasing the frequencies where electrons are supposedly trapped in sheaths [249]. An estimate for the frequency that can be optimum can be calculated under some assumptions. Neglecting drift and diffusion of electrons and assuming that recombination of electrons with CO+2 ions (density : ni) is the main loss process, than the frequency should be greater than the characteristic time (τc) of dissociative recombination reaction. τc = 1 (5.12) kDRni Here kDR is rate coefficient of dissociative recombination of CO+2 ions. If we assume quasi-neutrality ne = ni (5.13) From figure 5.7b, maximum value of ne is in the range of 1012 cm−3 and if we assume 5.9. RESULTS & DISCUSSION 140

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